Semiconductor device and method of manufacturing the same

ABSTRACT

A semiconductor device includes a resin sealing portion which has a plurality of side surfaces and a back surface which is formed between the side surfaces, a semiconductor chip which has a plurality of pads on a main surface thereof, a plurality of leads which are formed of conductor and each of which has a bonding portion, an external connection terminal portion and a cut portion, a plurality of wires which connect a plurality of leads and a plurality of pads of the semiconductor chip to each other, and a tab on which the semiconductor chip is mounted. By making the thickness of the cut portion of the lead smaller than the thickness of the external connection terminal portion, a lead sagging which is generated on the side surfaces of the resin sealing portion when the lead is cut by dicing after molding can be reduced.

BACKGROUND OF THE INVENTION

[0001] The present invention relates to a semiconductor manufacturing technique, and more particularly to an effective technique suitable for the enhancement of the reliability of a semiconductor device.

[0002] Among resin-sealed semiconductor devices which aim at miniaturizing thereof, in a semiconductor device which is assembled using a lead frame, there has been proposed a method in which semiconductor chips are mounted on respective tabs (chip mounting portions) of the lead frame for producing a large number of semiconductor devices and, thereafter, molding is performed by covering a plurality of device regions in the lead frame with one cavity of a mold frame (hereinafter, the molding method being referred to as “block” molding method).

[0003] In such a semiconductor device, after performing the block molding, the mold is individually divided by dicing.

[0004] Here, a method for manufacturing a resin-sealed or resin-encapsulated semiconductor device which is assembled by the block molding method using the lead frame is described in Japanese Unexamined Patent Publication No. 2001-24001, for example. Here disclosed is a technique in which by performing a resin mold up to opening portions formed in a peripheral portion of a device region of a lead frame, an inner stress of a molded product which is generated in a cutting step is decreased so that the warpage of the molded product is reduced whereby the productivity and the quality are enhanced.

SUMMARY OF THE INVENTION

[0005] However, as explained in conjunction with the above-mentioned technique, in assembling the semiconductor device by the block molding using the lead frame, after performing the molding, it is necessary to cut the resin sealing portion and the lead of the lead frame altogether and hence, a package which is a mixture of the metal lead and the resin sealing portion is cut by a dicing blade or the like.

[0006] By performing the cutting using such a dicing blade, there arises a phenomenon referred to as “lead sagging” (lead sagging 11 shown in a comparison example of FIG. 34) in which metal which constitutes a lead is adhered to an outer periphery of a cut surface of the lead due to a friction generated at the time of cutting (dicing stress). When the lead sagging 11 is projected from a lead mounting surface, the flatness of the lead mounting surface is deteriorated so that there arises a problem that the substrate adhesive strength is lowered and, at the same time, the substrate mounting ability becomes unstable.

[0007] Further, there arises a problem that a short-circuiting between leads is generated due to the adhered lead sagging.

[0008] Particularly, when a solder plating film is formed on the lead mounting surface, the solder plating film is more liable to form the sagging than the lead and hence, the above-mentioned problem is more liable to be generated.

[0009] Incidentally, in Japanese Unexamined Patent Publication No. 2001-24001, there is no description of the lead sagging which is generated when the lead is cut.

[0010] Accordingly, it is an object of the present invention to provide a semiconductor device and a manufacturing method thereof which can enhance the reliability by preventing the projection of a lead sagging toward a mounting surface of a lead.

[0011] It is another object of the present invention to provide a semiconductor device and a manufacturing method thereof which can enhance the reliability by preventing a short-circuiting between leads.

[0012] It is still another object of the present invention to provide a semiconductor device and a manufacturing method thereof which can enhance the substrate connection strength.

[0013] It is a further object of the present invention to provide a method for manufacturing a semiconductor device which can prevent the generation of resin flash on a lead mounting surface.

[0014] The above-mentioned object, other object and novel features of the present invention will be apparent from the description of this specification and attached drawings.

[0015] To briefly explain the summary of typical inventions out of inventions disclosed in the present specification, they are as follows.

[0016] That is, the present invention is directed to a semiconductor device including a resin sealing portion which has a mounting surface formed between a plurality of side surfaces, a semiconductor chip which is sealed by the resin sealing portion, a plurality of leads each of which respectively has a first portion thereof sealed by the resin sealing portion, a second portion thereof exposed to the mounting surface and third portions thereof exposed to the side surfaces and being formed of conductor, wherein the semiconductor device further includes a plurality of wires which electrically connect the plurality of leads and a plurality of electrodes of the semiconductor chip, and a plating film is formed on surfaces of the second portions of the leads, and the plating film is not formed on surfaces of the third portions of the lead.

[0017] Further, a manufacturing method of a semiconductor according to the present invention includes a step of preparing a lead frame having a first frame portion, a second frame portion which is formed in the inside of the first frame portion, a plurality of device regions which are formed in the inside of the second frame portion, a plurality of electrode portions which are respectively formed on the plurality of device regions, and first films which are laminated to a plurality of electrode portions, a step of fixedly mounting semiconductor chips on the device regions of the lead frame, a step of respectively connecting electrodes of the semiconductor chips and the electrode portions of the lead frame to each other by means of wires, a step of sealing the plurality of semiconductor chips, the plurality of wires and a portion of the lead frame with sealing resin, a step of removing the first films which are laminated to the electrode portions after the sealing step and at least portion of the plurality of electrode portions is exposed, and a step of separating the lead frame and the sealing resin portion corresponding to respective device regions after the sealing step.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018]FIG. 1 is a cross-sectional view showing one example of the structure of a semiconductor device (QFN) of the embodiment 1 of the present invention.

[0019]FIG. 2 is a side view showing the structure of the semiconductor device shown in FIG. 1.

[0020]FIG. 3 is a bottom plan view showing the structure of the semiconductor device shown in FIG. 1.

[0021]FIG. 4 is a plan view showing one example of the structure of a lead frame which is used for assembling the semiconductor device shown in FIG. 1.

[0022]FIG. 5 is a cross-sectional view showing one example of the structure of the lead frame shown in FIG. 4 after a tape is laminated to the lead frame.

[0023]FIG. 6 is a cross-sectional view showing one example of the structure in a semiconductor chip fixed state in the assembling of the semiconductor device shown in FIG. 1.

[0024]FIG. 7 is a cross-sectional view showing one example of the structure in a wire bonding state in the assembling of the semiconductor device shown in FIG. 1.

[0025]FIG. 8 is a cross-sectional view showing one example of the structure after molding in the assembling of the semiconductor device shown in FIG. 1.

[0026]FIG. 9 is a cross-sectional view showing one example of the structure in a tape-peeled-off state in the assembling of the semiconductor device shown in FIG. 1.

[0027]FIG. 10 is a cross-sectional view showing one example of the structure in an exterior plated state in the assembling of the semiconductor device shown in FIG. 1.

[0028]FIG. 11 is a cross-sectional view showing one example of the structure in a dicing state in the assembling of the semiconductor device shown in FIG. 1.

[0029]FIG. 12 is a cross-sectional view showing one example of the structure after dicing in the assembling of the semiconductor device shown in FIG. 1.

[0030]FIG. 13 is a cross-sectional view showing one example of the structure of the lead frame in the assembling of the semiconductor device shown in FIG. 1.

[0031]FIG. 14 is an enlarged partial cross-sectional view showing the structure of a portion A shown in FIG. 13.

[0032]FIG. 15 is an enlarged partial side view showing one example of a lead sagging state of the semiconductor device which is assembled using the lead frame shown in FIG. 13.

[0033]FIG. 16 is a bottom plan view showing one example of the structure of the lead frame after block molding in the assembling of the semiconductor device shown in FIG. 1.

[0034]FIG. 17 is plan view showing one example of the structure of the lead frame after block molding in the assembling of the semiconductor device shown in FIG. 1.

[0035]FIG. 18 is a partial bottom plan view showing the structure after block molding in the assembling using a lead frame of a modification of the embodiment 1 of the present invention.

[0036]FIG. 19 is an enlarged partial bottom plan view showing the structure of a portion B shown in FIG. 18.

[0037]FIG. 20 is an enlarged partial side view showing a lead sagging state of a semiconductor device which is assembled using a lead frame of a modification shown in FIG. 19.

[0038]FIG. 21 is a cross-sectional view showing one example of the structure of a semiconductor device (QFN) of the second embodiment of the present invention.

[0039]FIG. 22 is a side view showing the structure of the semiconductor device shown in FIG. 21.

[0040]FIG. 23 is a bottom plan view showing the structure of the semiconductor device shown in FIG. 21.

[0041]FIG. 24 is a plan view showing one example of the structure of a lead frame used in the assembling of the semiconductor device shown in FIG. 21.

[0042]FIG. 25 is a cross-sectional view showing one example of the structure after a tape is laminated to the lead frame shown in FIG. 24.

[0043]FIG. 26 is a cross-sectional view showing one example of a structure in a semiconductor chip fixed state in the assembling of the semiconductor device shown in FIG. 21.

[0044]FIG. 27 is a cross-sectional view showing one example of a semiconductor wafer structure for obtaining semiconductor chips in a fixed state in the assembling of the semiconductor device shown in FIG. 21.

[0045]FIG. 28 is a cross-sectional view showing one example in a dicing state in the assembling of a semiconductor device of another embodiment of the present invention.

[0046]FIG. 29 is a cross-sectional view showing one example in a post-dicing state in the assembling of a semiconductor device of another embodiment of the present invention.

[0047]FIG. 30 is an enlarged partial plan view showing the structure of a lead frame used in the assembling of the semiconductor device of another embodiment of the present invention.

[0048]FIG. 31 is a partial cross-sectional view showing the structure of a cut portion of the lead frame used in the assembling of the semiconductor device of another embodiment of the present invention.

[0049]FIG. 32 is a partial cross-sectional view showing the structure of a cut portion of the lead frame used in the assembling of the semiconductor device of another embodiment of the present invention.

[0050]FIG. 33 is a side view showing one example of the structure of a semiconductor device of a comparison example which is provided for comparison with the semiconductor device of the present invention.

[0051]FIG. 34 is an enlarged partial side view showing a lead sagging state at a portion C of the semiconductor device of the comparison example shown in FIG. 33.

[0052]FIG. 35 is a cross-sectional view showing one example of the structure in a state that the semiconductor device shown in FIG. 21 is mounted on a mounting substrate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0053] Preferred embodiments of the present invention are explained hereinafter in conjunction with attached drawings. In all drawings served for explaining the embodiments, parts which have identical functions are indicated by same symbols and the repeated explanation of the parts are omitted.

[0054] (Embodiment 1)

[0055] In the drawings, FIG. 1 is a cross-sectional view showing one example of the structure of a semiconductor device (QFN) of the embodiment 1 of the present invention, FIG. 2 is a side view showing the structure of the semiconductor device shown in FIG. 1, FIG. 3 is a bottom plan view showing the structure of the semiconductor device shown in FIG. 1, FIG. 4 is a plan view showing one example of the structure of a lead frame which is used for assembling the semiconductor device shown in FIG. 1, FIG. 5 is a cross-sectional view showing one example of the structure of the lead frame shown in FIG. 4 after a tape is laminated to the lead frame, FIG. 6 is a cross-sectional view showing one example of the structure in a semiconductor chip fixed state in the assembling of the semiconductor device shown in FIG. 1, FIG. 7 is a cross-sectional view showing one example of the structure in a wire bonding state in the assembling of the semiconductor device shown in FIG. 1, FIG. 8 is a cross-sectional view showing one example of the structure after molding in the assembling of the semiconductor device shown in FIG. 1, FIG. 9 is a cross-sectional view showing one example of the structure in a tape-peeled-off state in the assembling of the semiconductor device shown in FIG. 1, FIG. 10 is a cross-sectional view showing one example of the structure in an exterior plated state in the assembling of the semiconductor device shown in FIG. 1, FIG. 11 is a cross-sectional view showing one example of the structure in a dicing state in the assembling of the semiconductor device shown in FIG. 1, FIG. 12 is a cross-sectional view showing one example of the structure after dicing in the assembling of the semiconductor device shown in FIG. 1, FIG. 13 is a cross-sectional view showing one example of the structure of the lead frame in the assembling of the semiconductor device shown in FIG. 1, FIG. 14 is an enlarged partial cross-sectional view showing the structure of a portion A shown in FIG. 13, FIG. 15 is an enlarged partial side view showing one example of a lead sagging state of the semiconductor device which is assembled using the lead frame shown in FIG. 13, FIG. 16 is a bottom plan view showing one example of the structure after block molding in the assembling of the semiconductor device shown in FIG. 1, FIG. 17 is plan view showing one example of the structure after block molding in the assembling of the semiconductor device shown in FIG. 1, FIG. 18 is a partial bottom plan view showing the structure after block molding in the assembling using a lead frame of a modification of the embodiment 1 of the present invention, FIG. 19 is an enlarged partial bottom plan view showing the structure of a portion B shown in FIG. 18, and FIG. 20 is an enlarged partial side view showing a lead sagging state of a semiconductor device which is assembled using a lead frame of a modification shown in FIG. 19.

[0056] The semiconductor device shown in FIG. 1 to FIG. 3 is a small-sized semiconductor package of a resin sealing type as well as of a surface mounting type. In this embodiment 1, a QFN (Quad Flat Non-leaded Package) 5 is explained as one example of the semiconductor device.

[0057] As shown in FIG. 3, the QFN 5 is the semiconductor device of a peripheral type. In the QFN 5, the external connection terminal portions (second portions) 1 b of a plurality of leads (electrode portions) 1 a shown in FIG. 1 have surfaces (exposed surfaces) thereof arranged in an exposed manner in parallel along a peripheral portion of a mounting surface (hereinafter referred to as “back surface 3a” ) of a resin sealing portion 3 formed of a resin mold. Each lead 1 a performs a function of an inner lead which is embedded into the resin sealing portion 3 as well as a function of an outer lead which is exposed on the back surface 3 a of the resin sealing portion 3. Each lead 1 a includes a bonding portion 1 d which is sealed by the resin sealing portion 3 and constitutes a first portion to which wires 4 are connected, an external connection terminal portion 1 b which is provided with a surface exposed to the back surface 3 a of the resin sealing portion 3 and constitutes a second portion, and a cut portion 1 c which is provided with a surface exposed to a side surface 3 b of the resin sealing portion 3 and constitutes a third portion.

[0058] Further, the QFN 5 is a semiconductor device which is produced as follows. That is, using a multi-cavity lead frame 1 shown in FIG. 4, a block molding is performed such that a plurality of device regions 1 k in the lead frame 1 are molded by covering the device regions 1 k with one cavity 10 c of a mold frame 10 shown in FIG. 8. Thereafter, the device regions are divided and assembled as individual QFNs 5.

[0059] Subsequently, to explain the detailed constitution of the QFN 5, the QFN 5 includes the resin sealing portion 3 which has a plurality of sides 3 b and a back surface 3 a which is formed between the plurality of side surfaces 3 b and constitutes a mounting surface, the semiconductor chip 2 which has a pad 2 a constituting a plurality of electrodes on a main surface 2 b and is sealed with the resin sealing portion 3, a plurality of leads 1 a which are formed of conductor and each of which has the bonding portion 1 d, the external connection terminal portion 1 b and the cut portion 1 c, a plurality of wires 4 which are sealed with the resin sealing portion 3 and respectively electrically connect the plurality of leads 1 a and the plurality of pads 2 a of the semiconductor chip 2, and a tab 1 le which constitutes a chip mounting portion on which the semiconductor chip 2 is mounted. As shown in FIG. 1, on surfaces of the external connection terminal portions 1 b which constitute the second portions of the lead 1 a and are exposed to the back surface 3 a of the resin sealing portion 3, a plating film 6 is formed by soldering, while on surfaces of the cut portions 1 c of the lead 1 a which constitute the third portions, the plating film 6 is not formed.

[0060] That is, according to the embodiment 1, as shown in FIG. 13 and FIG. 14, the thickness of the cut portion 1 c of the lead 1 a of the lead frame 1 shown in FIG. 4 which is used for assembling the QFN 5 is made smaller than the thickness of the external connection terminal portion 1 b and the cut portion 1 c is used as a dicing area after molding to perform dicing. Accordingly, the generation of lead sagging (lead burring) 11 shown in FIG. 15 which is formed on the side surfaces 3 b of the resin sealing portion 3 at the time of cutting the lead by dicing can be largely reduced compared to a lead sagging 11 of the comparison example shown in FIG. 34.

[0061] To reduce the lead sagging 11, it is preferable to make the cross-sectional area of the cut portion 1 c on a plane which is parallel to the side surfaces 3 b of the resin sealing portion 3 where the cut portions 1 c of the lead 1 a are exposed smaller than the cross-sectional area of the external connection terminal portions 1 b. In the QFN 5 of the embodiment 1 shown in FIG. 1 to FIG. 3, an example in which the thickness of the cut portions 1 c of the lead 1 a is made smaller than the thickness of the external connection terminal portion 1 b is shown.

[0062] Here, the lead sagging 11 is generated due to a phenomenon that when a composite body formed of the metal-made lead 1 a and the resin-made resin sealing portion 3 is cut using a rasp-shaped machining member such as a dicing blade 9 shown in FIG. 11, metal which constitutes the lead 1 a is adhered or stuck to an end surface of the lead 1 a due to a friction generated. This phenomenon appears remarkably when copper or a copper alloy exhibiting low hardness is used as the material of lead 1 a.

[0063] However, even when the copper or the copper alloy is used as the material of the lead 1 a, by setting the cross-sectional area of the cut portion 1 c of the lead 1 a in the direction parallel to the side surface 3 b smaller than the cross-sectional area of the external connection terminal portion 1 b, an absolute quantity of adhered metal generated by the phenomenon can be reduced so that the short-circuiting of the leads can be prevented.

[0064] Here, when the thickness of the cut portion 1 c of the lead 1 a is made smaller than the thickness of the external connection terminal portion 1 b so as to reduce the cross-sectional area, the cut portion 1 c is covered with the resin at the time of sealing as shown in FIG. 1 so that the cut portion 1 c is embedded in the inside of the resin sealing portion 3 whereby the cut portion 1 c is not exposed to the back surface 3 a of the resin sealing portion 3.

[0065] Accordingly, even when the plating film 6 is formed by performing solder plating by using material which exhibits hardness lower than that of the copper or the copper alloy on the surface (exposed surface) of the external connection terminal 1 b of the lead 1 a which is exposed to the back surface 3 a of the resin sealing portion 3 after resin sealing, the solder plating is not formed on the surface of the cut portion 1 c. Accordingly, by dicing the lead 1 a and an inner frame portion 1 j which constitute portions applied with no solder plating, the generation of sagging due to the solder plating which exhibits hardness lower than that of sagging of lead 1 a and hence is easily liable to generate the sagging can be prevented and the short-circuiting between the cut portions 1 c of the lead 1 a due to the lead sagging 11 can be prevented.

[0066] Further, as shown in FIG. 15, it is possible to prevent the projection of the lead sagging 11 to the back surface 3 a of the resin sealing portion 3 so that the deterioration of the substrate connection strength can be prevented whereby the reliability of the QFN 5 can be enhanced and, at the same time, the yield rate can be enhanced.

[0067] With respect to machining for making the thickness of the cut portion 1 c of the lead 1 a thinner than the thickness of the external connection terminal portion 1 b, half etching machining or press machining such as coining can be used. Further, both of half etching and coining may be used.

[0068] Further, since it is possible to prevent the projection of the lead sagging 11 to the back surface 3 a of the resin sealing portion 3, the flatness of the exposed surface of the external connection terminal portion 1 b to the back surface 3 a of the resin sealing portion 3 can be ensured whereby the solder wettability at the time of mounting the QFN 5 to the substrate can be ensured.

[0069] Accordingly, the substrate connection strength of the QFN 5 when the QFN 5 is mounted on the mounting substrate 15 (see FIG. 35) can be enhanced.

[0070] Further, by making the thickness of the cut portion 1 c of the lead 1 a smaller than the thickness of the external connection terminal portion 1 b, a stress applied to the cutting surface when the lead is cut (or divided into individual QFNs 5) by dicing can be reduced.

[0071] Accordingly, the peeling between the lead 1 a and the resin sealing portion 3 can be reduced and hence, the reliability of the QFN 5 can be enhanced and the yield rate of the QFN 5 can be enhanced.

[0072] Here, with respect to the QFN 5 of the embodiment 1, as shown in FIG. 1, the semiconductor chip 2 is fixed to the tab (chip mounting portion) 1 e by way of a die bonding material 8 such as a silver paste, for example.

[0073] Further, as shown in FIG. 4, each tab 1 e has corner portions thereof supported by suspension leads 1 g. That is, the QFN 5 of the embodiment 1, as shown in FIG. 3, adopts the tab exposure structure in which the tabs 1 e and the suspension leads 1 g are exposed on the back surface 3 a of the resin sealing portion 3.

[0074] Further, the wires 4 are, for example, made of gold lines and the resin which forms the resin sealing portion 3 is made of thermosetting epoxy resin or the like, for example.

[0075] Subsequently, the method for manufacturing the QFN 5 of the embodiment 1 is explained hereinafter.

[0076] Here, the QFNs 5 are assembled by adopting a tape molding method such that the block molding is performed and, thereafter, the lead frame 1 is divided into individual QFNs 5 by dicing, and a piece of tape having an adhesive strength is laminated to each lead 1 a.

[0077] The reason that the tape molding method is adopted is as follows. In performing the block molding using the multi-cavity lead frame 1 shown in FIG. 4, with respect to the lead frame 1 which is arranged in the inside of a cavity 10 c of a mold frame 10 shown in FIG. 8, by preventing the floating of the lead 1 a which is arranged toward the inside remote from a mold line from the tape, the occurrence of resin flash burrs can be prevented and the external connection terminal portions 1 b of the leads 1 a can be projected toward the back surface 3 a of the resin sealding portion 3.

[0078] That is, with respect to the conventional QFNs, to prevent the turn-around (resin flash) of thin seal resin to the electrode mounting surface in a resin sealing step and to ensure the projection of electrodes from the seal resin, a sheet molding method has been adopted. However, compared to the conventional molding method in which respective electrodes are arranged in the vicinity of an outer periphery of the mold line (profile of the cavity 10 c), the leads 1 a which are arranged at a position disposed inside and far remote from the mold line in the block molding method. Accordingly, in the conventional molding method which presses the leads 1 a to the sheet using only the clamping force of the mold frame 10, it is difficult to prevent the occurrence of the resin flash and to allow the leads 1 a to be projected from the back surface 3 a of the resin sealing portion 3.

[0079] In view of the above, the block molding method of the embodiment 1 adopts the tape molding method in which a sheet of tape having the adhesive force is laminated to respective leads 1 a.

[0080] Further, in adopting the tape molding method, it is preferable to perform a step for laminating the tape for tape molding to the lead frame 1 before a wire bonding step. It is more preferable to perform such a step before a die bonding step.

[0081] This is because when the tape is laminated after the wire bonding step, since the semiconductor chips 2 and wires 4 are connected to the lead frame 1, portions at which the leads 1 a can be pressed for lamination are substantially restricted only to the dicing regions.

[0082] In the lamination step which presses only such narrow regions, it is difficult to ensure the reliability with respect to the adhesion between the leads 1 a and the tape and, at the same time, the flatness of the leads 1 a is deteriorated. Accordingly, it is preferable to perform the lamination of the tape for tape molding to the lead frame 1 prior to the die bonding step or the wire bonding step.

[0083] Further, in adopting the tape molding method, in the embodiment 1, the QFNs 5 have the tab exposure structure shown in FIG. 1 to FIG. 3. The tab exposure structure is explained hereinafter.

[0084] The reason that this tab exposure structure is adopted is as follows. That is, in the manufacturing method in which the tape for tape molding is laminated prior to the die bonding step and the wire bonding step, it is necessary to perform the die bonding step and the wire bonding step in the state that the back surfaces of the tabs le are laminated to the tape.

[0085] That is, to cover the back surfaces of the tabs 1 e with the seal resin, it is necessary to form a gap in which the seal resin flows between the tape and the tabs 1 e preliminarily. However, in the above-mentioned manufacturing method in which the tape is preliminarily laminated to the lead frame 1, when the gap is provided between the tabs 1 e and the tape, it is impossible to support the tabs 1 e from below (from tape side) and hence, it is difficult to ensure the stability and the flatness of the tabs 1 e.

[0086] In this manner, it is extremely difficult to perform the die bonding and the wire bonding in the state that tabs 1 e are unstable.

[0087] Further, although heating is performed from a stage on which the lead frame 1 is mounted to conduct a temperature control of the semiconductor chips 2 in the wire bonding step, in the state that the gap is defined between the tabs 1 e and the tape, heat from the stage is hardly transmitted to the semiconductor chip 2 and, at the same time, it is difficult to uniformly heat the semiconductor chips 2 so that the temperature control becomes unstable.

[0088] To the contrary, by preliminarily laminating the tabs 1 e and the tape to each other, while it is possible to ensure the stability of the tabs 1 e in the die bonding step and the wire bonding step, it is also possible to perform the temperature control using a stage in a more stable manner in the wire bonding step.

[0089] By performing the resin sealing step in the state that the tabs 1 e are laminated to the tape in the above-mentioned manner, it is possible to provide the structure which exposes the back surface of the tab 1 e to the back surface 3 a of the resin sealing portion 3. The QFNs 5 which are assembled in this method are shown in FIG. 1 to FIG. 3.

[0090] Subsequently, the specific manufacturing steps of the QFNs 5 shown in FIG. 1 to FIG. 3 are explained. First of all, the lead frame 1 is prepared, wherein the lead frame 1 includes an outer frame portion 1 h which constitutes a first frame portion, an inner frame portion 1 j which is formed inside the outer frame portion 1 h and constitutes a second frame portion, a plurality of device regions 1 k which are formed inside the inner frame portion 1 j, the leads 1 a which are respectively formed in the plurality of device regions 1 k and constitute a plurality of electrode portions, and the tabs 1 e which are respectively formed in a plurality of device regions 1 k and constitute a plurality of chip mounting portions as shown in FIG. 4. Further, as shown in FIG. 5, the lead frame 1 includes the insulation tape (first film) 1 f which constitutes the tape for tape molding which is laminated to a plurality of leads 1 a and a plurality of tabs 1 e.

[0091] That is, as mentioned previously, it is preferable to perform the lamination of the tape for tape molding with respect to the lead frame 1 prior to the die bonding step and the wire bonding step. Accordingly, in this embodiment, a case in which the insulation tape 1 f which constitutes the tape for tape molding is preliminarily adhered to respective leads 1 a and respective tabs 1 e in respective device regions 1 k is explained.

[0092] With respect to the insulation tape 1 f which constitutes the tape for tape molding, it is preferable to use a tape having high heat resistance such as a polyimide tape, for example. In the example shown in FIG. 5, a sheet of insulation tape 1 f is laminated to the lead frame 1 shown in FIG. 4.

[0093] Further, the respective leads 1 a are connected to the inner frame portion 1 j by way of the cut portions 1 c shown in FIG. 1 respectively and each tab 1 e is supported by the suspension leads 1 g at four corner portions and the suspension leads 1 g are connected to the inner frame portion 1 j.

[0094] Further, as shown in FIG. 13 and 14, with respect to the lead frame 1 of this embodiment, the thickness of the cut portion 1 c in each lead 1 a is made smaller than the thickness of the external connection terminal portion 1 b.

[0095] Thereafter, the die bonding shown in FIG. 6 is performed in which a plurality of semiconductor chips 2 each of which includes a plurality of pads 2 a are fixed to the tabs 1 e in a plurality of device regions 1 k of the lead frame 1.

[0096] Here, the semiconductor chips 2 are fixed to the tabs 1 e by way of the die bonding material 8 such as the silver paste shown in FIG. 1.

[0097] Since the tabs 1 e are fixed to the insulation tape 1 f, the die bonding step can be performed on the stable tabs 1 e.

[0098] Thereafter, the wire bonding step is performed in which the respective pads 2 a of a plurality of semiconductor chips 2 and the corresponding leads 1 a which constitute a plurality of electrode portions in the lead frame 1 are electrically connected by way of a plurality of wires 4 as shown in FIG. 7.

[0099] Here, since the tab exposure structure in which the finish machining of the tabs 1 e is not performed is adopted, heat generated by a heater of a wire bonder in the bonding stage is efficiently and uniformly transmitted to the semiconductor chips 2 by way of the insulation tape 1 f and the tabs 1 e so that the reliability of the wire bonding can be enhanced.

[0100] Further, since the tabs 1 e are fixed to the insulation tape 1 f, the wire bonding step can be performed on the stable tabs 1 e.

[0101] Thereafter, the molding is performed so as to seal a plurality of semiconductor chips 2, a plurality of wires 4 and portions of the leads 1 a and the tabs 1 e of the lead frame 1 with the seal resin.

[0102] Here, as shown in FIG. 8, a plurality of semiconductor chips 2, a plurality of wires 4 and the portions of the leads 1 a and the tabs 1 e of the lead frame 1 are covered with one cavity 10 c of an upper mold frame 10 a, for example, of the mold frame 10 and the seal resin is filled in the cavity 1 c so as to perform the block molding.

[0103] That is, after completion of the die bonding and the wire bonding, as shown in FIG. 8, the lead frame 1 is arranged on a molding surface of a lower mold frame 10 b of the mold frame 10 such that the insulation tape 1 f side of the lead frame 1 is disposed at the lower side and a plurality of semiconductor chips 2, a plurality of wires 4 and the leads 1 a and the tabs 1 e of the lead frame 1 are covered with one cavity 10 c of the upper mold frame 10 a and, thereafter, the block molding is performed.

[0104] Due to such a block molding, the resin sealing portion 3 in which a plurality of semiconductor chips 2 and a plurality of wires 4 are collectively sealed with resin.

[0105] For example, FIG. 16 and 17 show the back side (FIG. 16) and the front side (FIG. 17) of the post-molding structure of an example in which the block molding is performed by covering four device regions 1 k with one cavity 10 c, wherein four resin sealing portions 3 which collectively seal four device regions 1 k are formed on the lead frame 1 shown in FIG. 4.

[0106] As shown in FIG. 9, after molding, the tape peeling-off step is performed so as to remove the insulation tape 1 f laminated to a plurality of leads 1 a and a plurality of tabs 1 e so as to expose the surfaces (portions) of the external connection terminal portions 1 b of a plurality of leads 1 a.

[0107] Here, the back surfaces of the tabs 1 e are also exposed.

[0108] Thereafter, as shown in FIG. 10, an exterior plating forming step is performed so as to apply a plating on the surfaces of the external connection terminal portions 1 b and the surfaces of the tabs 1 e of respective leads 1 a which are exposed to the back surfaces 3 a of the resin sealing portions 3.

[0109] Here, the exterior plating is constituted of a solder plating, for example, wherein the plating films 6 are formed on the surfaces of the external connection terminal portions 1 b and the surfaces of the tabs 1 e of respective leads 1 a.

[0110] Here, the exterior plating may be formed of palladium (Pd) plating, for example. In this case, the palladium plating is applied in the lead frame stage which is performed prior to the package assembling.

[0111] Thereafter, the lead frame 1 and the resin sealing portion 3 are divided into the individual QFNs 5 corresponding to respective device regions 1 k.

[0112] Here, the resin sealing portion 3 and the cut portions 1 c of the lead frame 1 are cut together by dicing using the dicing blade 9 shown in FIG. 11 so as to divide them into individual QFNs 5 shown in FIG. 12.

[0113] In performing such a dicing, in the embodiment 1, as shown in FIG. 11, the dicing blade 9 is advanced from the front surface side of the resin sealing portion 3 which is collectively formed. Then, the dicing blade 9 is further advanced along dicing lines 1 i shown in FIG. 17 so as to divide the resin sealing portions 3 into individual QFNs 5 by dicing for respective device regions 1 k.

[0114] Here, with respect to the lead frame 1 of the embodiment 1, as shown in FIG. 13 and FIG. 14, the thickness of the cut portions 1 c of the lead 1 a is made thinner than the thickness of the external connection terminal portions 1 b thus exhibiting the smaller cross-sectional area compared to the cross-sectional area of the external connection terminal portions 1 b. Accordingly, as shown in FIG. 15, the lead sagging (lead burrs) 11 which are generated on the side surfaces 3 b of the resin sealing portion 3 at the time of dividing the resin sealing portion 3 into individual QFNs 5 by dicing (at the time of cutting the leads) after molding can be reduced so that it is possible to prevent the lead sagging 11 from being projected to the back surface 3 a side of the resin sealing portion 3.

[0115] Subsequently, a modification of the lead frame 1 of the embodiment 1 shown in FIG. 18 to FIG. 20 is explained hereinafter.

[0116] With respect to the lead frame 1 shown in FIG. 18 and FIG. 19, in making the cross-sectional area of a cut portion 1 c of a lead 1 a on a plane parallel to a side surface 3 b of a resin sealing portion 3 smaller than a cross-sectional area of an external connection terminal portion 1 b, a width of each cut portion 1 c (third portion) is set smaller than a width of the external connection terminal portion 1 b (second portion) with respect to the arrangement direction of a plurality of leads 1 a.

[0117] That is, with respect to a plurality of leads 1 a, the width of the cut portion 1 c of each lead 1 a is made narrower than the width of the external connection terminal portion 1 b of the lead 1 a. Due to such a constitution, each distance defined between a plurality of cut portions 1 c which are exposed to the side surfaces 3 b of the resin sealing portion 3 can be set larger than the distance between the external connection terminal portions 1 b.

[0118] Accordingly, as shown in FIG. 20, the distance between the read sagging 11 and the cut portion 1 c of the neighboring lead 1 a can be increased so that the short-circuiting between the lead cut portions 1 c due to the lead sagging 11 can be prevented.

[0119] In the structure which narrows the width of the cut portion 1 c as shown in FIG. 18 and FIG. 19, to prevent the deterioration of the flatness of the lead 1 a while ensuring the strength of the cut portion 1 c, the thickness of the cut portion 1 c of the lead 1 a can be made equal to or more than the thickness of the external connection portion 1 b as shown in FIG. 20. Further, the cut portion 1 c may have the thickness which is equal to or less than the thickness of the external connection terminal portion 1 b when the cut portion 1 c can ensure the sufficient strength even when the cut portion 1 c is thin.

[0120] (Embodiment 2)

[0121] In the drawings, FIG. 21 is a cross-sectional view showing one example of the structure of a semiconductor device (QFN) of the second embodiment of the present invention, FIG. 22 is a side view showing the structure of the semiconductor device shown in FIG. 21, FIG. 23 is a bottom plan view showing the structure of the semiconductor device shown in FIG. 21, FIG. 24 is a plan view showing one example of the structure of a lead frame used in the assembling of the semiconductor device shown in FIG. 21, FIG. 25 is a cross-sectional view showing one example of the structure of the lead frame after a tape is laminated to the lead frame shown in FIG. 24, FIG. 26 is a cross-sectional view showing one example of a structure in a semiconductor chip fixed state in the assembling of the semiconductor device shown in FIG. 21, and FIG. 27 is a cross-sectional view showing one example of a semiconductor wafer structure for obtaining fixing semiconductor chips in the assembling of the semiconductor device shown in FIG. 21.

[0122] In the QFN 11 of this embodiment 2 shown in FIG. 21 to FIG. 23,. chip fixing tapes (second films) 12 formed of an insulation body are used in place of the tabs 1 e as chip mounting portions.

[0123] That is, as shown in FIG. 21, a semiconductor chip 2 is fixed to the chip fixing tape 12. Here, the chip fixing tape 12 is constituted of an insulation tape member such as a polyimide tape provided with an adhesive layer, for example.

[0124] Accordingly, the QFN 11 is not provided with the tabs 1 e and the suspension leads 1 g which support the tab 1 e as shown in FIG. 3 and hence, as shown in FIG. 23, a portion of an external connection terminal portion 1 b (exposed surface) of each lead 1 a and the chip fixing tape 12 are exposed to the back surface 3 a of the resin sealing portion 3.

[0125] Due to such a constitution, with respect to a mounting substrate 15 on which the QFN 11 is mounted, as shown in FIG. 35, it is also possible to form an uppermost-layer wiring 15 a (wiring constituting the same layer as a mounting land) on a region of the QFN 11 below the chip fixing tape 12 so that the mountability can be enhanced.

[0126] That is, with respect to the QFN 5 which has been explained in conjunction with the embodiment 1, when the uppermost layer wiring 15 a (particularly, signal line) is arranged below the tab 1 e of the mounting substrate 15, the semiconductor chip 2 picks up noises from the wiring by way of the tab 1 e and hence, it is difficult to arrange the uppermost layer wiring 15 a of the mounting substrate 15 below the tab 1 e.

[0127] This tendency becomes more apparent when the surface of the semiconductor chip 2 opposite to a main surface 2 b of the semiconductor chip 2 and the tab 1 e are electrically connected to each other.

[0128] On the other hand, according to the QFN 11 of the embodiment 2, the insulative chip fixing tape 12 is arranged at the back surface of the chip and hence, the insulation of the back surface of the chip can be ensured so that the influence of the noises from the uppermost layer wiring 15 a of the mounting substrate 15 can be reduced. Accordingly, as shown in FIG. 35, it is possible to arrange the uppermost layer wiring 15 a such as the signal wiring at the mounting substrate 15 even right below the semiconductor chip 2.

[0129] As a result, the wiring density of the mounting substrate 15 can be enhanced so that the mounting substrate 15 can be miniaturized. Here, an inner wiring 15 b is formed in the mounting substrate 15 and the inner wiring 15 b is connected to the uppermost layer wiring 15 a by way of a via hole wiring 15 c. Further, a lead 1 a of the QFN 11 is connected to the uppermost layer wiring 15 a by way of a solder fillet 16. Still further, a portion of the uppermost layer wiring 15 a is covered with a solder resist film 15 d.

[0130] To assemble the QFN 11, first of all, a tabless lead frame 1 shown in FIG. 25 which is formed by laminating an insulation tape if which constitutes a first film to the lead frame 1 is prepared.

[0131] On the other hand, with respect to the semiconductor chip 2, as shown in FIG. 27, a semiconductor wafer 7 having a back surface 7 b thereof to which a chip fixing tape 12 is preliminarily laminated is prepared and, thereafter, the semiconductor wafer 7 is divided into individual QFNs by dicing so as to prepare the semiconductor chips 2 which laminates the chip fixing tapes 12 to the back surfaces 7 b thereof. The semiconductor chips 2 are fixed to the insulation tape 1 f by way of the chip fixing tapes 12.

[0132] That is, for example, a two-layered dicing tape 14 which is constituted of the chip fixing tape 12 having an adhesive layer and an ultraviolet ray irradiation type tape 13 is laminated to back surface 7 b of the semiconductor wafer 7. Then, the semiconductor wafer 7 and the chip fixing tape 12 are cut from the main surface 7 a side in the wafer state and, at the same time, the dicing tape 14 is half-diced so as to divide the semiconductor wafer into individual semiconductor chips 2 while preventing the scattering thereof.

[0133] Thereafter, ultraviolet rays are irradiated to the ultraviolet-ray irradiation type tape 13 of the dicing tape 14 so as to weaken the adhesive force of the ultraviolet-ray irradiation type tape 13.

[0134] Subsequently, the semiconductor chips 2 are peeled off from the ultraviolet-ray irradiation type tape 13 and are divided into individual semiconductor chips, as shown in FIG. 26, and the die bonding is performed so as to fix the individual semiconductor chips 2 to the insulation tape 1 f of the tabless lead frame 1 by way of the chip fixing tape 12.

[0135] Thereafter, in the same manner as the assembling of the QFN 5 of the embodiment 1, the wire bonding, the block molding, the peeling-off of the insulation tape 1 f and the separation into individual packages by dicing are sequentially performed so as to manufacture the QFN 11 shown in FIG. 21 to FIG. 23.

[0136] Here, in the assembling of the QFN 11 of the embodiment 2, the chip fixing tapes 12 which are fixed to respective device regions 1 k are exposed by peeling off the insulation tape 1 f.

[0137] In the QFN 11 of this embodiment 2, since the semiconductor chips 2 can be supported using the chip fixing tapes 12 which are thinner than the tabs 1 e shown in FIG. 1, the QFN 11 can be made further thinner and, at the same time, the insulation below the chips can be reliably ensured by interposing the insulative chip fixing tapes 12 below the chips.

[0138] Considering that the insulation tape 1 f is peeled off after molding, it is preferable to adopt the chip fixing tape 12 which exhibits high peelability. It is also possible to use a tape member whose adhesive strength can be weakened by the irradiation of ultraviolet rays in the same manner as ultraviolet ray irradiation type tape 13.

[0139] Although the invention which has been made by inventors has been specifically explained in conjunction with the embodiments of the present invention, the present invention is not limited to the above-mentioned embodiments of the present invention and it is needless to say that various modifications are conceivable without departing from the gist of the present invention.

[0140] For example, in the embodiment 1, in performing the dicing after the block molding, the advancing direction of the dicing blade 9 is set to a direction from the surface side of the resin sealing portion 3. However, as in the case of another embodiment shown in FIG. 28, the dicing blade 9 may be advanced from the back surface 3 a side of the resin sealing portion 3 so as to divide the lead frame 1 into individual QFNs 5 as shown in FIG. 29.

[0141] In this case, the dicing blade 9 is made to travel along the dicing line 1 i on the back surface 3 a side of the resin sealing portion 3 shown in FIG. 16 so as to divide the lead frame 1 into individual QFNs 5 as shown in FIG. 16.

[0142] By advancing the dicing blade 9 from the back surface 3 a side of the resin sealing portion 3 as shown in FIG. 28, the alignment prior to the dicing or during the dicing can be performed by detecting the external connection terminal portion 1 b of the lead 1 a exposed to the back surface 3 a of the resin sealing portion 3 and further by utilizing a pattern of the external connection terminal portion 1 b (here, however, the pattern of the lead 1 a including the resin pattern on the back surface 3 a of the resin sealing portion 3 which is in an complementary relationship with the pattern of the lead 1 a) Accordingly, it is possible to prevent the rupture of the lead 1 a which may occur due to the displacement of alignment at the time of performing the dicing. Accordingly, with respect to the dicing which is performed after the alignment is performed based on the pattern of the lead 1 a, it is preferable to advance the dicing blade 9 from the lead 1 a side.

[0143] Further, with respect to the structure which makes the cut portion 1 c of the lead 1 a in the embodiment 1 and the embodiment 2 thin, to prevent the bending of the lead 1 a in the lateral direction while ensuring the strength of the cut portion 1 c, the lead width of the cut portion 1 c may be set to a value equal to the lead width of the external connection terminal portion 1 b. Alternatively, as in the case of the lead 1 a of another embodiment shown in FIG. 30, the lead width of the cut portion 1 c may be set to a value larger than the width of the external connection terminal portion 1 b.

[0144] Further, when the cut portion 1 c of the lead 1 a is narrow in width but still can ensure the sufficient strength thereof, the width of the cut portion 1 c of the lead 1 a may be set to a value equal to or less than the width of the external connection terminal portion 1 b.

[0145] Still further, to make the cut portion 1 c of the lead 1 a thinner than the external connection terminal portion 1 b, as in the case of another embodiments shown in FIG. 31 and FIG. 32, besides the mounting surface side of the cut portion 1 c, the upper side of the cut portion 1 c is also recessed to make the cut portion 1 c thin.

[0146] Here, with respect to the lead 1 a shown in FIG. 31, an upper recessed portion 1 m is formed in the cut portion 1 c. Due to such a constitution, it is possible to make the resin sealing portion 3 overhang at the upper side of the cut portion 1 c so that the adhesiveness between the resin sealing portion 3 and the lead 1 a can be enhanced and, at the same time, a peel-off stress between the resin sealing portion 3 and the lead 1 a which is generated when the lead is cut can be reduced.

[0147] Further, with respect to the lead 1 a shown in FIG. 32, an upper inclined recessed portion 1 n is formed in the cut portion 1 c. Due to such a constitution, it is also possible to reduce the peel-off stress which is generated between the resin sealing portion 3 and the lead 1 a at the time of cutting the lead 1 a.

[0148] To briefly recapitulate the advantageous effects obtained by the typical inventions out of the inventions disclosed in this application, they are as follows.

[0149] By making the cross-sectional area of the cut portion of the lead on the plane parallel to the side surfaces of the resin sealing portion smaller than the cross-sectional area of the external connection terminal portion, the lead sagging which is generated due to the dicing after the block molding can be reduced. 

What is claimed is:
 1. A semiconductor device comprising: a resin sealing portion which has a plurality of side surfaces and a mounting surface formed between the plurality of side surfaces; a semiconductor chip which is sealed by the resin sealing portion and includes a plurality of electrodes; a plurality of leads which are formed of conductor, each lead having a first portion sealed by the resin sealing portion, a second portion exposed to the mounting surface and third portions exposed to the side surfaces; a plurality of wires which are sealed by the resin sealing portion, the wires electrically connecting the plurality of leads with a plurality of electrodes of the semiconductor chip, respectively, wherein a plating film is formed on a surface of the second portion of the lead and the plating film is not formed on a surface of the third portions of the lead.
 2. A semiconductor device according to claim 1, wherein the leads are constituted of copper or a copper alloy and the plating film has a low hardness compared with a hardness of the copper or the copper alloy which constitutes the lead.
 3. A semiconductor device according to claim 1, wherein on a plane parallel to side surfaces to which the third portions are exposed, a cross-sectional area of the third portion is set smaller than a cross-sectional area of the second portion.
 4. A semiconductor device according to claim 1, wherein the third portiona are covered with the resin sealing portion on the mounting surface.
 5. A semiconductor device comprising: a resin sealing portion which has a plurality of side surfaces and a mounting surface formed between the plurality of side surfaces; a semiconductor chip which is sealed by the resin sealing portion and includes a plurality of electrodes; a plurality of leads which are formed of conductor, each lead having a first portion sealed by the resin sealing portion, a second portion exposed to the mounting surface and third portions exposed to the side surfaces; a plurality of wires which are sealed by the resin sealing portion, the wires electrically connecting the plurality of leads with a plurality of electrodes of the semiconductor chip, respectively, wherein, in a plurality of leads, a distance between the third portions is set larger than a distance between the second portions.
 6. A semiconductor device according to claim 5, wherein, with respect to an arrangement direction of a plurality of leads, a width of the third portion is set smaller than a width of the second portion.
 7. A semiconductor device comprising: a resin sealing portion which has a plurality of side surfaces and a mounting surface formed between the plurality of side surfaces; a semiconductor chip which is sealed by the resin sealing portion and includes a plurality of electrodes; a plurality of leads which are formed of conductor, each lead having a first portion sealed by the resin sealing portion, a second portion exposed to the mounting surface and third portions exposed to the side surfaces; a plurality of wires which are sealed by the resin sealing portion, the wires electrically connecting the plurality of leads with a plurality of electrodes of the semiconductor chip, respectively, wherein lead burrs are formed on surfaces of the third portions of the leads and are retracted from exposed surfaces of the second portions of the leads.
 8. A semiconductor device comprising: a resin sealing portion which has a plurality of side surfaces and a mounting surface formed between a plurality of side surfaces; a semiconductor chip which is sealed by the resin sealing portion and includes a plurality of electrodes; a plurality of leads which are formed of conductor, each lead having a first portion sealed by the resin sealing portion, a second portion exposed to the mounting surface and third portions exposed to the side surfaces; a plurality of wires which are sealed by the resin sealing portion, the wires electrically connecting the plurality of leads with a plurality of electrodes of the semiconductor chip, respectively; and a chip mounting portion which is formed of an insulating body and exposed to mounting surfaces of the resin sealing portions.
 9. A manufacturing method of a semiconductor device comprising the steps of: (a) preparing a lead frame having a first frame portion, a second frame portion which is formed inside the first frame portion, a plurality of device regions which are formed inside the second frame portion, a plurality of electrode portions which are respectively formed on the plurality of device regions, and first films which are laminated to a plurality of electrode portions; (b) fixedly mounting a plurality of semiconductor chips each of which includes a plurality of electrodes on the plurality of device regions of the lead frame; (c) respectively connecting the plurality of electrodes of the plurality of semiconductor chips with the plurality of electrode portions of the lead frame by means of a plurality of wires; (d) sealing the plurality of semiconductor chips, the plurality of wires and a portion of the lead frame with sealing resin; (e) removing the first films adhered to the plurality of electrode portions after the sealing step and exposing at least a portion of the plurality of electrode portions; and (f) separating the lead frame and the sealing resin portion corresponding to every device region after the sealing step.
 10. A manufacturing method of a semiconductor device according to claim 9, wherein after the step (e) and before the step (f), a plating is applied to the portions of the electrode portions which are exposed in the step (e).
 11. A manufacturing method of a semiconductor device according to claim 9, wherein the lead frame which is prepared in the step (a) includes chip mounting portions laminated to the first films at the plurality of respective device regions, and in the step (b), the plurality of semiconductor chips are respectively fixed to the chip mounting portions.
 12. A manufacturing method of a semiconductor device according to claim 9, wherein in the step (b), the plurality of semiconductor chips are respectively fixed to the first films by way of second films which constitute chip mounting portions formed of an insulating body.
 13. A manufacturing method of a semiconductor device according to claim 12, wherein in the step (e), at least a portion of the second films are exposed by removing the first films.
 14. A manufacturing method of a semiconductor device according to claim 9, wherein a polyimide tape is used as the first films.
 15. A manufacturing method of a semiconductor device according to claim 9, wherein in dividing the resin sealing portion into individual pieces for every device region in the step (f), an alignment is performed by detecting the second portions of the plurality of leads which are exposed to mounting surfaces of the resin sealing portion, and the resin sealing portion is divided into the individual pieces by advancing a dicing blade from the mounting surface side of the resin sealing portion.
 16. A manufacturing method of a semiconductor device according to claim 12, wherein in fixing the semiconductor chips by way of the second films, semiconductor chips in which the second films are adhered to back surfaces are prepared by dividing a semiconductor wafer in which the second films are preliminarily adhered to a back surface into individual pieces by dicing, and the semiconductor chips are fixed to the first films by way of the second films. 